Tu2B.4
1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate
Presenter: Leh Woon Lim,
Agency for Science, Technology and Research (A*STAR),
Singapore
We present PVD AlN microring resonators on SiO2-on-Si substrate with intrinsic Q-factor >1 million at C-band. To the best of our knowledge, this is the highest intrinsic Q-factor reported for PVD AlN on SiO2-on-Si substrate.Authors: Amy Tong, Agency for Science, Technology and Research (A*STAR) / Wing Wai Chung, Agency for Science, Technology and Research (A*STAR) / Charmaine Goh, Agency for Science, Technology and Research (A*STAR) / Landobasa Y. M. Tobing, Agency for Science, Technology and Research (A*STAR) / Leh Woon Lim, Agency for Science, Technology and Research (A*STAR) / Yuriy Akimov, Agency for Science, Technology and Research (A*STAR) / Zhan Jiang Quek, Agency for Science, Technology and Research (A*STAR) / Aravind Anthur, Agency for Science, Technology and Research (A*STAR) / Jia Sheng Goh, Agency for Science, Technology and Research (A*STAR) / Huamao Lin, Agency for Science, Technology and Research (A*STAR) / Navab Singh, Agency for Science, Technology and Research (A*STAR) / Qingxin Zhang, Agency for Science, Technology and Research (A*STAR) / Doris K. T. Ng, Agency for Science, Technology and Research (A*STAR)